@InCollection{SCI:Kir2001a, author = "R.M. Kirby and G.E. Karniadakis and O. Mikulchenko and K. Mayaram", title = "Integrated Simulation for MEMS: Coupling Flow-Structure-Thermal-Electrical Domains", booktitle = "The MEMS Handbook", year = "2001", editor = "M. Gad-el-Hak", publisher = "Informa UK Limited", }